Evaluation of Piezoresistivity Properties of Sputtered ZnO Thin Films

Evaluation of Piezoresistivity Properties of Sputtered ZnO Thin Films

Author Cardoso, Guilherme Wellington Alves Google Scholar
Leal, Gabriela Google Scholar
Silva Sobrinho, Argemiro Soares da Google Scholar
Fraga, Mariana Amorim Google Scholar
Massi, Marcos Autor UNIFESP Google Scholar
Institution Inst Tecnol Aeronaut ITA
Fac Tecnol São Paulo FATEC SP
Universidade Federal de São Paulo (UNIFESP)
Abstract Zinc oxide (ZnO) thin films were deposited by RF reactive magnetron sputtering on silicon (100) substrates under different experimental conditions. ZnO films were studied before and after annealing treatment at 600 degrees C. the crystallinity, electrical resistivity, stoichiometry, thickness, and elastic modulus of the films were investigated. ZnO piezoresistors were produced using microelectronics processes, such as photolithography, lift-off, and reactive ion etching (RIE). Cantilever method was used to determine the gauge factor, and measurements of Temperature Coefficient of Resistance (TCR) were performed on a hotplate. the optimization of the deposition conditions produced ZnO thin films with controlled stoichiometry (ZnO), crystalline microstructure (phase wurzite, 002), high elastic modulus (156 GPa), and low electrical resistivity (0.072 ohm.cm), which are good properties for application as piezoresistive pressure microsensor. in addition, the ZnO piezoresistors had a GF of 2.6 on the deformation in the plane (100) and TCR of -1610 ppm/K up to 250 degrees C.
Keywords ZnO
thin film
magnetron sputtering
Language English
Sponsor Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)
Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
Date 2014-05-01
Published in Materials Research-ibero-american Journal of Materials. Sao Carlos: Univ Fed Sao Carlos, Dept Engenharia Materials, v. 17, n. 3, p. 588-592, 2014.
ISSN 1516-1439 (Sherpa/Romeo, impact factor)
Publisher Univ Fed Sao Carlos, Dept Engenharia Materials
Extent 588-592
Origin http://dx.doi.org/10.1590/S1516-14392014005000080
Access rights Open access Open Access
Type Article
Web of Science ID WOS:000338017600008
SciELO ID S1516-14392014005000080 (statistics in SciELO)
URI http://repositorio.unifesp.br/handle/11600/37700

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